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Low loss BPSG deposition with customer specified refractive index |
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Refractive index delta: 0.1% to 4% |
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Waveguide dimensions: 0.1
μm to 20 μm |
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Thin film heaters for phase shifting/switching |
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Wells for hybrid (flip-chip) bonding of active components, MEMs or other components |
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Wafer size: 150 mm |
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Substrate: silicon or quartz |
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Custom structures: Biomedical, etched micro- structures, sensors |